Model

AME-EVP180G-2S-LV

Power supply

AC220V, 60Hz

Installation conditions

1. Use environment temperature 25℃±15℃, humidity 55%Rh±10%Rh;

2. Equipment power supply: AC220V, 50Hz, must be well grounded;

3. Rated power: 2500w;

4. Equipment gas: the equipment chamber needs to be filled with argon for cleaning, and the customer needs to prepare argon, pureDegree ≥99.99%;

5. The size of the working table is 600mm×600mm×700mm, and the load-bearing capacity is more than 70kg;

6. Ventilation is required for placement.

technical parameter

1. Number of evaporation sources: 2, each evaporation source is equipped with baffles;

2. Evaporation source voltage: 10V

3. Evaporation current 0～100A continuously adjustable

4. Equipped with 2 tungsten boats and 2 tungsten wire baskets;

5. Stainless steel rotating upper sample stage with a diameter of 60mm;

6. The distance between the sample and the evaporation source is 60～100mm continuously adjustable;

7. The vacuum chamber is a stainless steel chamber with an outer diameter of 170mm, an inner diameter of 160mm, and a height of 210mm;

8. The pumping interface of the vacuum chamber is KF40;

9. The air inlet interface is a 1/4-inch double ferrule joint, and a stainless steel fine-tuning valve is installed by default to adjust the air intake;

10. The display is a 7-inch color touch screen;

11. The evaporation current can be adjusted, and the evaporation safety current value and safe vacuum value can be set;

12. Safety protection: the evaporation current will be automatically cut off if the vacuum is too low;

13. Ultimate vacuum: 5x10-5Pa (with molecular pump);

14. The vacuum measurement is a resistance gauge vacuum gauge, and its range is: 1～105Pa

Precautions

In order to give full play to the vacuum performance of the cavity, it is recommended to use it with a molecular pump set.

Max power

1200W

Evaporation sources

Tungsten wire basket x2

Vacuum chamber

Material: high purity quartz φ180mm x 210mm

Max temp.

1700℃

Thermocouple

B type

Vacuum gauge

Resistance-type vacuum gauge

Vacuum interface

KF16

Inlet interface

1/4NPS

Overall Dimensions

500x350x400mm

Optional accessories

Thickness monitor

1. Film thickness resolution: 0.0136Å (aluminum)

2. Film thickness accuracy: ±0.5%, depending on the process conditions, especially the position of the sensor, material stress, temperature and density

3. Measuring speed: 100ms-1s/time, the measuring range can be set: 500000Å (aluminum)

4. Standard sensor crystal: 6MHz

5. Applicable chip frequency: 6MHz Applicable chip size: Φ14mm Mounting flange: CF35

Key parameters

l  Double evaporation source

l  Rotating sample stage

l  Evaporating current 0-100A

l  Adjustable distance between sample stage and evaporation source

l  With molecular pump set, 5E-4Pa

l  With water cooler