AME-SPC-16C is a compact DC magnetron sputtering and evaporation coater with a adjustable controller. It can DC sputtering coat metallic materials and evaporation carbon onto the sample with the diameter up to 50 mm
DC Magnetron Sputtering &evaporation coater | |
Model No. | AME-SPC-16C |
Target diameter | Φ50mm |
Sample stage | Φ50mm |
Chamber dimension | Φ160*110mm |
Vacuum degree | 4×10-1mbar-2×10-2mbar |
Maxi working current | 50mA |
Maxi Time setting | 9999s |
Maxi voltage | 1600VDC, adjustable |
Vacuum pump | Two stage rotary vacuum pump |
Working voltage | AC220V 50Hz |