-
-
TEL: +7 495 134-07-94
Email: Order@liontechnology.Ru
The dual-target magnetron sputtering coating equipment is a cost-effective magnetron sputtering coating equipment independently developed by our company, which has the characteristics of standardization, modularization and customization. Magnetron targets are available in 1 inch and 2 inches, customers can choose according to the size of the plated substrate; the power supply is 300W RF power supply plus 500W DC power supply, DC power supply can be used for the preparation of metal film, RF power supply can be used for non-metal For film preparation, two targets can meet the needs of multi-layer or multiple coatings. If customers have other coating needs, they can customize DC power supply and pulse power supply. Various types of power supplies are available in various specifications from 300W to 1000W.
|
Sample stage |
Size |
φ185mm |
Temperature control accuracy |
±1℃ |
|
Heating temperature |
Max 500℃ |
Rotate speed |
1-20rpm adjustable |
|
|
Magnetron Sputtering target head |
Quantity |
2”×2 (1”,2” optional) |
Water chiller |
Circulating water chiller with flow rate of 10L/min |
|
Cooling mode |
Water cooling |
|
|
|
|
Vacuum chamber |
Chamber size |
φ300mm×300mm |
Watch window |
φ100mm |
|
Chamber material |
Stainless steel |
Opening mode |
Top cover open |
|
|
Mass flowmeter |
2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs) |
|||
|
Vacuum system |
Model |
AME-GZK103-A |
Pumping interface |
KF40 |
|
Molecular pump |
CY-600 |
Exhaust interface |
KF16 |
|
|
Backing pump |
rotary vane pump |
Vacuum measurement |
Compound vacuum gauge |
|
|
Ultimate vacuum |
1.0E-5Pa |
Power supply |
AC;220V 50/60Hz |
|
|
Pumping rate |
Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes |
|||
|
Power configuration |
Quantity |
RF power supply×2 |
Max output power |
RF 300 W |
|
Other parameters |
Supply voltage |
AC220V,50Hz |
Overall size |
600mm×650mm×1280mm |
|
Total power |
2.5KW |
Total Weight |
About 300kg |
|
