PECVD-Rotating plasma enhanced CVD equipment

Product model: AME-PECVD-R

Basic introduction:

This product is a PECVD-R rotary plasma enhanced CVD equipment. PECVD-RRotating plasma enhanced CVD equipment is very suitable for continuous coating and modification of powder materials by CVD method in an atmosphere protected environment.

Details description:

Rotating PECVD:This product is a plasma-enhanced rotary chemical vapor deposition system (rotating PECVD). The furnace tube adopts a variable-diameter design. The middle tube diameter is relatively thick and there is a mixing baffle. It can repeatedly mix powder or particles with the rotation of the furnace tube. The working tube can be rotated 360° uninterruptedly through mechanical transmission control, so that the materials in the tube can be stirred and mixed to obtain a uniform heating effect; the equipment is also equipped with a plasma generator, which is connected to the furnace tube by inductive coupling, and the generated plasma can cover the furnace tube effectively. Increase the activation energy of the reactants, reduce the reaction temperature, and improve the reaction efficiency. The equipment is equipped with a three-way mass flow meter and a gas mixing device, which can be used to pass a variety of gases into the pipe. At the same time, the equipment is equipped with a high-performance mechanical pump that can quickly evacuate the furnace pipe to vacuum; Kind of CVD process. The rotating device is very suitable for continuous coating and modification of powder materials by CVD method in an atmosphere protected environment.

Technical parameter:

Double temperature zone tube furnace	Product number	AME-O1200-60IIC-R
	equipment power	3KW
	Furnace tube material	High purity quartz
	Furnace tube size	Φ60420+Φ100360+Φ60*420mm (quartz shaped tube)
	Furnace length	440mm
	Heating zone length	200mm+200mm
	Operating temperature	0～1150℃
	Limit temperature	1200°C
	Temperature control accuracy	±1℃
	Thermocouple type	K-type thermocouple
	Temperature control mode	30-segment program temperature control, PID parameter self-tuning
	Display mode	HD full-color LCD touch screen
	Sealing method	304 stainless steel vacuum flange
	Power supply	AC: 220V 50/60Hz
	spinning speed	0~13rpm
	slope	0~35°
3-way mass flow meter	Product number	AME-3Z
	Flowmeter type	Mass flowmeter
	Number of gas paths	3 way
	Measuring range	A way: 0~100sccm; B way: 0~200 sccm; C way: 0~500 sccm
	measurement accuracy	±1.5%
	Working pressure difference	0.1~0.5MPa
	Pipeline interface	1/4 inch compression fitting
	powered by	AC220V 50/60Hz
Vacuum system	Vacuum pump	Bipolar rotary vane pump
	Pumping speed	1.1L/s
	Suction port	KF16
	Pump ultimate vacuum	10E-1Pa
	powered by	AC220V 50/60Hz
RF power supply	Signal frequency	13.56MHz±0.005%
	Power output range	0~500W
	*Large reflected power	100W
	RF output interface	50Ω, N-Type, female
	Power stability	≤5W