Product parameters

Rotary plate heating temperature range

At room temperature - 150℃

Temperature Control

0.1℃

Temperature control precision

<±0.5℃（Stable temperature control accuracy）

Temperature uniformity of turntable

<±2%

Spindle speeds

100-5000rpm

Speed resolution

±1rpm

Adjustable range of acceleration

100-5000rpm/s

Maximum single step spin coating time

3000s

Temporal resolution

0.1s

Up to 100 groups of 100 steps can be programmed, more scalability

Standard with adjustable claw tray (10-30mm square or circular plate adjustable), other specifications can be customized